Finnan had to be subsituted against Southampton after suffering a nasty gash on his leg that required eight stitches while Milan Baros and Harry Kewell failed to make the sixteen after suffering with a hamstring injury and a groin injury respectively.
However, all three are expected to recover and be available for selection to face the league leaders at Anfield.
Benitez said: "Finnan and Baros should be okay to be in the squad for Chelsea. Baros had a problem with his hamstring but I think he will be back for Chelsea. Harry Kewell should be okay as well but I will need to talk with the physio and see how he is."